SiC コーティングされたバレル サセプタ

Semicorex SiC Coated Barrel Susceptor is a high purity SiC coated graphite carrier, using in the process to grow the epitaxial layer on the wafer chip, which is suitable for many epitaxial reactors. It has high heat and corrosion resistance, which has great stability in extreme environment.
Our SiC Coated Barrel Susceptor is also resistant to high-temperature oxidation and corrosion, making it a reliable and durable product. Its high melting point ensures that it can withstand the high-temperature environment required for efficient semiconductor manufacturing.
Contact us today to learn more about our SiC Coated Barrel Susceptor.

Parameters of SiC Coated Barrel Susceptor

Features of SiC Coated Barrel Susceptor

- Avoid peeling off and ensure coating on all surface

High temperature oxidation resistance: Stable at high temperatures up to 1600°C

High purity: made by CVD chemical vapor deposition under high temperature chlorination conditions.

Corrosion resistance: high hardness, dense surface and fine particles.

Corrosion resistance: acid, alkali, salt and organic reagents.

- Achieve the best laminar gas flow pattern

- Guarantee evenness of thermal profile

- Prevent any contamination or impurities diffusion